NSU Research Contributions

Title : Balanced truncation model reduction for laser heating wafer model in frequency restricted domain

Authors : Md. Saiduzzaman, Md. Shafiqul Islam, Md. Sumon Hossain, M. Monir Uddin, Mohammad Osman Gani

Abstract : Modeling and simulating laser heating phenomena are crucial for optimizing manufacturing processes and ensuring high-quality final products. A major challenge in semiconductor manufacturing is achieving accurate, real-time temperature control during wafer heating. To reduce the computational burden of complex mathematical models, low-dimensional reduced models can be employed. In this paper, we develop a mathematical model for laser heating in silicon wafers. For model reduction, we use the balanced truncation method, considering both frequency-unrestricted and restricted cases. Additionally, the rational Krylov subspace method is applied to solve high-dimensional sparse matrix equations. To gain key physical insights, we use the COMSOL Multiphysics package. Finally, some numerical experiments are conducted using MATLAB to validate the proposed approach.

Journal : Franklin Open	Volume : 9	Year : 2024	Issue :
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